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Goal is to commercialize CNT pellicle technology for EUV lithography.
December 15, 2023
By: DAVID SAVASTANO
Editor, Ink World Magazine
Imec and Mitsui Chemicals, a leading Japanese chemical company and EUV pellicle supplier, announced the start of a strategic partnership on the commercialization of carbon-nanotube (CNT) based pellicles for extreme ultraviolet (EUV) lithography. Under this partnership, Mitsui Chemicals will integrate imec’s fundamental CNT-based pellicle innovation into Mitsui Chemicals’ pellicle technology to achieve full production specifications, targeting its introduction in high-power EUV systems in the ...
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